What Is Target Utilization Plasma Sputtering? How Is Percent Of Target Utilization Calculated?
Target utilization plasma sputtering is an area to deposit functional thin film in a specific area and near the chamber.
Calculation Percentage of Target Utilization
The target utilization percentage estimated based on the ratio of the target erosion volume to the volume calculated under the assumption that the target is completely eroded at a maximum erosion depth. Target erosion depth profile and calculation of the target utilization percentage.