Saturday , October 23 2021

Explain A Typical Radio-Frequency Plasma Discharge System?

Typical Radio-Frequency Plasma Discharge System

A typical Radiofrequency plasma discharge system is shown in the figure below.

 It involves a voltage source that flows current through a low-pressure gas between two parallel conducting plates. The gas breaks down to form typical plasma, a usually weakly ionized plasma is formed between the electrodes.

The process chamber can be surrounded by dc multipole magnetic fields to improve plasma confinement near the chamber surfaces.

While providing a magnetic near-field, free plasma atmosphere creates at the wafer. Such arrangements are often called remote sources.

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